Title :
Error correction at four-port on-wafer S-parameter measurements
Author :
Mernyei, Ferenc ; Aoki, Ikuro ; Matsuura, Hiroyuki
Author_Institution :
Dept. of Res. & Dev., Teratec Corp., Tokyo, Japan
Abstract :
In this paper measurement errors are investigated at four-port measurements, carried out on monolithic microwave integrated circuits (MMIC) with wafer probe heads. Error terms caused by the imperfect load provided by the probe heads are given. A method for overcoming these measurement errors is introduced. Our method gives the equivalent circuit parameters directly for the investigated structure (parameter extraction)
Keywords :
MMIC; S-parameters; equivalent circuits; measurement errors; microwave measurement; multiport networks; equivalent circuit parameters; error correction; four-port; imperfect load; measurement errors; monolithic microwave integrated circuits; on-wafer S-parameter measurements; parameter extraction; probe heads; wafer probe heads; Equivalent circuits; Error correction; Integrated circuit measurements; MMICs; Measurement errors; Microwave integrated circuits; Microwave measurements; Monolithic integrated circuits; Probes; Scattering parameters;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1994. IMTC/94. Conference Proceedings. 10th Anniversary. Advanced Technologies in I & M., 1994 IEEE
Conference_Location :
Hamamatsu
Print_ISBN :
0-7803-1880-3
DOI :
10.1109/IMTC.1994.351971
