Adaptive position control of integrated linear actuator and flexure mechanism

This paper proposes model reference adaptive control (MRAC) for an integrated design of a voice coil motor and flexure mechanism to achieve a high-precision position. Based on the continuous deformation property of the flexure mechanism, the positioning system possesses linear motional characteristics without influence from the nonlinear phenomena of backlash and friction. MRAC controller design is then applied to enhance the positioning performance under the condition of system parametric uncertainties. Finally, simulation results verify the effectiveness of the proposed integrated mechanism design and control scheme to achieve a positioning precision better than 1 mum.