Title :
Hybrid inspection system for LCD color filter panels
Author_Institution :
Eng. Div., Lasertec Corp., Yokohama, Japan
Abstract :
We developed a hybrid color filter inspection system which contributes to increasing the production yield of color filters. As LCD production consists of many processes, the following topics are required: further decrease of the inspection time; grain defect repairement; photomask inspection accuracy improvement; quick feedback of the results for each process; and defect analysis. In addition to this, TFT panel production also requires automatic inspection system and repair system
Keywords :
automatic testing; electronic equipment manufacture; fault location; flat panel displays; inspection; liquid crystal displays; optical filters; LCD color filter panels; TFT panel production; automatic inspection; defect analysis; feedback; grain defect; hybrid inspection; inspection time; photomask inspection; production yield; Electrical capacitance tomography; Electrodes; Eyes; Filtering; Humans; Inspection; Manufacturing; Optical filters; Production systems; Thin film transistors;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1994. IMTC/94. Conference Proceedings. 10th Anniversary. Advanced Technologies in I & M., 1994 IEEE
Conference_Location :
Hamamatsu
Print_ISBN :
0-7803-1880-3
DOI :
10.1109/IMTC.1994.352006
