DocumentCode
2340363
Title
ASDAM ´98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172)
fYear
1998
fDate
5-7 Oct. 1998
Abstract
The following topics were dealt with: submicron MOS technology; characterisation of structures and devices; modelling and simulation; Schottky structures; materials and technologies; heterostructures; optoelectronic structures; MEMS; biosensors and chemical sensors
Keywords
biosensors; chemical sensors; electric sensing devices; micromechanical devices; semiconductor device models; semiconductor devices; semiconductor materials; semiconductor technology; MEMS; Schottky structures; advanced semiconductor devices; biosensors; characterisation of devices; characterisation of structures; chemical sensors; heterostructures; materials aspects; modelling; optoelectronic structures; simulation; submicron MOS technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices and Microsystems, 1998. ASDAM '98. Second International Conference on
Conference_Location
Smolenice Castle, Slovakia
Print_ISBN
0-7803-4909-1
Type
conf
DOI
10.1109/ASDAM.1998.730152
Filename
730152
Link To Document