Wide-range RF MEMS variable inductor using micro pump actuator

A novel variable radio-frequency (RF) microelectromechanical system (MEMS) inductor using micro-pump actuator is presented, which inductance is of- nH for GHz applications.The variable inductor has micro-pump fluid conductor as mercury and a spiral inductor fabricated on a Si CMOS chip. Micropump activates the fluid displacement by using passive microvalves. The fluid moves between inter-spires distance and shortening the path length of the current through the structure; leading to reduction of the stored magnetic energy, and hence the inductance. To reduce the substrate loss and thus increase the quality factor of the inductor, the silicon underneath spiral inductor is etched away. Electrical performance of variable inductor is analyzed using a 3D electromagnetic simulation tool (Ansoft). At 8.3 GHz, the simulated inductor is continuously varied from 2.22 nH to 0.88 nH, i.e., the variable range is above 100%. The proposed variable inductor is perspective key component for the multi-band RF circuits such as electrically controllable matching circuits and wide tuning range voltage controlled oscillator (VCO).