Title :
Temperature dependent emissivity metrology development at NIST in support of RTP needs
Author :
Hanssen, Leonard M. ; Khromchenko, Vladimir ; Mekhontsev, Sergey N.
Author_Institution :
NIST, Gaithersburg, MD, USA
Abstract :
Measurement instrumentation and methodology for temperature dependent emissivity of solid materials are under development in NIST´s Fourier Transform Spectrophotometry Laboratory. The effort is directed to support US industrial needs for emissivity data and standards for a broad range of applications including rapid thermal processing (RTP). The measurement approach and instrumentation design for several systems under construction are described. In particular, a vacuum goniometer for reflectance and transmittance measurement has been designed for the characterization of the emissivity of RTP samples.
Keywords :
emissivity; goniometers; light transmission; measurement standards; rapid thermal processing; reflectometry; Fourier transform spectrophotometry laboratory; NIST; RTP; emissivity; reflectance; temperature dependence; transmittance; vacuum goniometer; Construction industry; Fourier transforms; Goniometers; Instruments; Laboratories; Metrology; NIST; Rapid thermal processing; Solids; Temperature dependence;
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2003. RTP 2003. 11th IEEE International Conference on
Print_ISBN :
0-7803-7874-1
DOI :
10.1109/RTP.2003.1249135
