DocumentCode :
2341319
Title :
Panel discussion on emissivity standards for rtp
Author :
Adams, Bruce E.
Author_Institution :
Applied Materials
fYear :
2003
fDate :
23-26 Sept. 2003
Firstpage :
153
Lastpage :
153
Keywords :
Calibration; Electronics industry; Measurement standards; Optical films; Optical filters; Optical sensors; Optical surface waves; Semiconductor device modeling; Surface resistance; Temperature measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2003. RTP 2003. 11th IEEE International Conference on
Conference_Location :
Charleston, SC, USA
Print_ISBN :
0-7803-7874-1
Type :
conf
DOI :
10.1109/RTP.2003.1249138
Filename :
1249138
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2341319
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