DocumentCode :
2341338
Title :
The role of emissivity standards in advanced rtp
Author :
Bremensdorfer, Rolf
Author_Institution :
Mattson Thermal Products
fYear :
2003
fDate :
23-26 Sept. 2003
Firstpage :
155
Lastpage :
156
Keywords :
Dielectric materials; Dielectric measurements; Manufacturing; Narrowband; Robustness; Silicon; Standardization; Stimulated emission; Temperature measurement; Wavelength measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2003. RTP 2003. 11th IEEE International Conference on
Print_ISBN :
0-7803-7874-1
Type :
conf
DOI :
10.1109/RTP.2003.1249139
Filename :
1249139
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2341338
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