Title :
Emissivity of semiconductor substrate in non-equilibrium environment
Author_Institution :
Atmel Corporation
Keywords :
Absorption; Atomic measurements; Conducting materials; Semiconductor materials; Solids; Spontaneous emission; Springs; Stimulated emission; Substrates; Temperature;
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2003. RTP 2003. 11th IEEE International Conference on
Print_ISBN :
0-7803-7874-1
DOI :
10.1109/RTP.2003.1249140