DocumentCode :
2341378
Title :
Why emisspvity standards and what characteristics?
Author :
Peuse, Bruce
Author_Institution :
Mattson Technology, Inc
fYear :
2003
fDate :
23-26 Sept. 2003
Firstpage :
159
Lastpage :
160
Keywords :
Calibration; Measurement standards; Optical films; Optical materials; Optical receivers; Pollution measurement; Semiconductor materials; Silicon; Stimulated emission; Temperature measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2003. RTP 2003. 11th IEEE International Conference on
Print_ISBN :
0-7803-7874-1
Type :
conf
DOI :
10.1109/RTP.2003.1249141
Filename :
1249141
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2341378
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