Angular dependence of EEDF in ion-beam plasma

Summary form only given. In previous paper (Dudin, 1991) the results of measurements of electron energy distribution function (EEDF) in ion-beam plasma created by low energy broad ion beam had been presented regardless of the angular dependence of the electron distribution. The present work is specifically aimed towards elucidating the spatial structure of the EEDF in the ion-beam plasma. To solve this problem combination of the techniques of cylindrical probe, "large" plate probe (5/spl times/5 mm) and two-grid energoanalyzer was used. Directional operation of the probes makes possible measurement of angular dependence of electron distribution function which is anisotropic in high energy region. To optimize the construction of the probe-analyzer, experiments with grids were performed, which had different size, mesh, and transparency, under different potentials, and with different distances between grids. Numerical simulation of the analyzer was performed too.