Title :
Development of silicon-based micro sensor for oxygen measurement in gas phase
Author :
Lee, Jason C S ; Patton, Jesse C. ; Spelman, Francis A.
Author_Institution :
Center of Bioeng., Washington Univ., Seattle, WA, USA
Abstract :
We report our successful development of a silicon-based membrane-covered oxygen sensor for use in gas samples. We covered each sensor with polyhydroxyethyl methacrylate (pHEMA) and polysiloxane on a wafer scale by spin coating and photocrosslinking techniques. The resultant sensors demonstrate a fast response and good linearity to oxygen
Keywords :
biosensors; gas sensors; membranes; microsensors; oxygen; polymer films; O2; Si; environmental monitoring; fast response; gas phase; gas samples; good linearity; oxygen measurement; pHEMA; photocrosslinking techniques; polyhydroxyethyl methacrylate; polysiloxane; respiratory gas monitoring; silicon-based membrane-covered oxygen sensor; silicon-based micro sensor; spin coating; wafer scale; Biomembranes; Biosensors; Electrodes; Fabrication; Gas detectors; Microsensors; Oxygen; Polymers; Silicon; Silver;
Conference_Titel :
Engineering in Medicine and Biology Society, 1994. Engineering Advances: New Opportunities for Biomedical Engineers. Proceedings of the 16th Annual International Conference of the IEEE
Conference_Location :
Baltimore, MD
Print_ISBN :
0-7803-2050-6
DOI :
10.1109/IEMBS.1994.415164
