Title :
Lights and shadows in european RTP history (as it happened or raight have happened)
Author :
Nényei, Z. ; Roters, G.
Author_Institution :
Mattson Thermal Products GmbH
Keywords :
Books; Electrons; History; Lamps; Licenses; Marketing and sales; Mirrors; Rapid thermal processing; Springs; Uninterruptible power systems;
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2002. RTP 2002. 10th IEEE International Conference of
Print_ISBN :
0-7803-7465-7
DOI :
10.1109/RTP.2002.1039462
