DocumentCode

2342746

Title

Lights and shadows in european RTP history (as it happened or raight have happened)

Author

Nényei, Z. ; Roters, G.

Author_Institution

Mattson Thermal Products GmbH

fYear

2002

fDate

2002

Firstpage

197

Lastpage

205

Keywords

Books; Electrons; History; Lamps; Licenses; Marketing and sales; Mirrors; Rapid thermal processing; Springs; Uninterruptible power systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Thermal Processing of Semiconductors, 2002. RTP 2002. 10th IEEE International Conference of

Print_ISBN

0-7803-7465-7

Type

conf

DOI

10.1109/RTP.2002.1039462

Filename

1039462