Title :
Sensors and IC´s for instrumentation
Author_Institution :
Yokogawa Electr. Corp., Tokyo, Japan
Abstract :
In a field of electronic measurement, technologies of an integration have been proceeded slowly due to the hurdle of complexity of a signal conversion which consists of a huge number of sensors, transmitters, and actuators. Our technical interests in this field include sensors using three-dimensional Si micro machining technology, and sensor interface integrated circuits using a mixed signal analog-digital IC technology. Tabulated results are presensted for Si resonant sensors, micropressure sensors and for the following types of sensor interface IC´s: signal conditioner circuits, power metering IC´s, solid state relays and field bus IC´s
Keywords :
electric sensing devices; elemental semiconductors; field buses; mixed analogue-digital integrated circuits; power measurement; pressure sensors; semiconductor relays; signal processing; signal processing equipment; silicon; CMOS; DMOS; Si 3D micro machining technology; Si resonant sensors; bipolar ICs; electronic measurement; field bus IC; micropressure sensors; mixed signal analog-digital IC technology; power metering IC; sensor interface integrated circuits; signal conditioner circuits; signal conversion; solid state relays; Actuators; Analog integrated circuits; Analog-digital conversion; Analog-digital integrated circuits; Instruments; Integrated circuit measurements; Integrated circuit technology; Machining; Resonance; Transmitters;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1994. IMTC/94. Conference Proceedings. 10th Anniversary. Advanced Technologies in I & M., 1994 IEEE
Conference_Location :
Hamamatsu
Print_ISBN :
0-7803-1880-3
DOI :
10.1109/IMTC.1994.352191
