• DocumentCode
    2342767
  • Title

    History of semiconductors diffusion engineering

  • Author

    Lojek, B.

  • Author_Institution
    ATMEL Corp., Colorado Springs, CO, USA
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    209
  • Lastpage
    241
  • Abstract
    The author presents a personal view of the history of semiconductor diffusion engineering. Starting with the announcement of a new invention in 1948 - the transistor - he goes on to include the applications of diffusion transistors at Bell Telephone Laboratories, Western Electric, Shockley and Fairchild, and integrated circuits at Fairchild, Texas Instruments and Sylvania. He concludes with a discussion of commercially available diffusion furnaces 1960-1965.
  • Keywords
    heat treatment; history; integrated circuit manufacture; semiconductor device manufacture; semiconductor technology; transistors; Bell Telephone Laboratories; Fairchild; Shockley; Sylvania; Texas Instruments; Western Electric; commercially available diffusion furnaces; diffusion transistors; history; integrated circuits; semiconductor diffusion engineering; Application specific integrated circuits; Companies; Furnaces; History; IEEE news; Instruments; Laboratories; Microelectronics; Springs; Telephony;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Thermal Processing of Semiconductors, 2002. RTP 2002. 10th IEEE International Conference of
  • Print_ISBN
    0-7803-7465-7
  • Type

    conf

  • DOI
    10.1109/RTP.2002.1039463
  • Filename
    1039463