DocumentCode
2342767
Title
History of semiconductors diffusion engineering
Author
Lojek, B.
Author_Institution
ATMEL Corp., Colorado Springs, CO, USA
fYear
2002
fDate
2002
Firstpage
209
Lastpage
241
Abstract
The author presents a personal view of the history of semiconductor diffusion engineering. Starting with the announcement of a new invention in 1948 - the transistor - he goes on to include the applications of diffusion transistors at Bell Telephone Laboratories, Western Electric, Shockley and Fairchild, and integrated circuits at Fairchild, Texas Instruments and Sylvania. He concludes with a discussion of commercially available diffusion furnaces 1960-1965.
Keywords
heat treatment; history; integrated circuit manufacture; semiconductor device manufacture; semiconductor technology; transistors; Bell Telephone Laboratories; Fairchild; Shockley; Sylvania; Texas Instruments; Western Electric; commercially available diffusion furnaces; diffusion transistors; history; integrated circuits; semiconductor diffusion engineering; Application specific integrated circuits; Companies; Furnaces; History; IEEE news; Instruments; Laboratories; Microelectronics; Springs; Telephony;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Thermal Processing of Semiconductors, 2002. RTP 2002. 10th IEEE International Conference of
Print_ISBN
0-7803-7465-7
Type
conf
DOI
10.1109/RTP.2002.1039463
Filename
1039463
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