Title :
History of semiconductors diffusion engineering
Author_Institution :
ATMEL Corp., Colorado Springs, CO, USA
Abstract :
The author presents a personal view of the history of semiconductor diffusion engineering. Starting with the announcement of a new invention in 1948 - the transistor - he goes on to include the applications of diffusion transistors at Bell Telephone Laboratories, Western Electric, Shockley and Fairchild, and integrated circuits at Fairchild, Texas Instruments and Sylvania. He concludes with a discussion of commercially available diffusion furnaces 1960-1965.
Keywords :
heat treatment; history; integrated circuit manufacture; semiconductor device manufacture; semiconductor technology; transistors; Bell Telephone Laboratories; Fairchild; Shockley; Sylvania; Texas Instruments; Western Electric; commercially available diffusion furnaces; diffusion transistors; history; integrated circuits; semiconductor diffusion engineering; Application specific integrated circuits; Companies; Furnaces; History; IEEE news; Instruments; Laboratories; Microelectronics; Springs; Telephony;
Conference_Titel :
Advanced Thermal Processing of Semiconductors, 2002. RTP 2002. 10th IEEE International Conference of
Print_ISBN :
0-7803-7465-7
DOI :
10.1109/RTP.2002.1039463