Numerical simulation of ECR microwave plasma stream

Summary Form only given, as follows. The authors have simulated an electron cyclotron resonance (ECR) microwave plasma stream along a moderate gradient magnetic field. The magnetic flux density decreases gradually from the ECR region in the plasma chamber toward the specimen table. The simulation is kinetic; ions are assumed to flow collisionlessly along the field line, and electrons are considered collisional enough for the Boltzmann relation to be valid. A Monte Carlo description of the ion dynamics, coupled with Boltzmann electrons, is used to develop an iterative scheme for the Vlasov equation and quasi-neutrality. The effects of the mirror field on the electrostatic potential profile along the magnetic field line and the energy distribution of the ions incident on the specimen have been determined.<>