Title :
Benefits of phase interference detection to IC waveform probing
Author :
Block, Jeffrey A. ; Lo, W.K. ; Shaw, Chris
Author_Institution :
Schlumberger SABER, San Jose, CA, USA
Abstract :
At-speed, internal-node, backside laser-probing of flip-chip ICs using amplitude and phase-sensitive detection modes is characterized. Results show that phase-sensitive detection gives consistently higher signal quality, is less sensitive to probing conditions such as probe placement and sample drift, and can acquire waveforms at nodes difficult to probe using amplitude detection
Keywords :
CMOS integrated circuits; Michelson interferometers; flip-chip devices; integrated circuit testing; light interferometry; measurement by laser beam; optical signal detection; probes; production testing; IC waveform probing; Michelson interferometer; at-speed laser-probing; backside laser-probing; flip-chip ICs; internal-node laser-probing; phase interference detection; phase interferometric detection mode; phase-sensitive detection; probe placement; signal quality; Interference; Intrusion detection; Laser beams; Laser modes; Manufacturing processes; Mirrors; Optical attenuators; Phase detection; Probes; Sun;
Conference_Titel :
Test Symposium, 2001. Proceedings. 10th Asian
Conference_Location :
Kyoto
Print_ISBN :
0-7695-1378-6
DOI :
10.1109/ATS.2001.990279
