A finger-mounted silicon tactile sensor

Describes the development of a silicon-based force sensor packaged in a flexible polyimide package. Sensitivity to force is realized via the addition of a solid dome over the silicon diaphragm. The dome acts to transmit the applied force to the diaphragm. Torlon and epoxy domes are bench tested. The epoxy dome produces significant hysteresis, while the Torlon dome shows low hysteresis and low nonrepeatability. Output sensitivities of 1.4 mV/V/N are typical. The response is linear for low forces (<10-N) and becomes curvilinear at higher forces when the diaphragm bottoms out. Characterization of the force sensor system and preliminary finger-mounted results are presented