A finger-mounted silicon tactile sensor

Author

Beebe, D.J. ; Hsieh, A.S. ; Denton, D.D.

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

fYear

1994

fDate

1994

Firstpage

834

Abstract

Describes the development of a silicon-based force sensor packaged in a flexible polyimide package. Sensitivity to force is realized via the addition of a solid dome over the silicon diaphragm. The dome acts to transmit the applied force to the diaphragm. Torlon and epoxy domes are bench tested. The epoxy dome produces significant hysteresis, while the Torlon dome shows low hysteresis and low nonrepeatability. Output sensitivities of 1.4 mV/V/N are typical. The response is linear for low forces (<10-N) and becomes curvilinear at higher forces when the diaphragm bottoms out. Characterization of the force sensor system and preliminary finger-mounted results are presented

Keywords

biomedical equipment; biomedical measurement; force measurement; tactile sensors; Torlon dome; curvilinear response; epoxy dome; finger-mounted silicon tactile sensor; flexible polyimide package; force sensitivity; hysteresis; nonrepeatability; Force sensors; Hysteresis; Packaging; Polymers; Protection; Sensor phenomena and characterization; Silicon; Solids; Tactile sensors; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society, 1994. Engineering Advances: New Opportunities for Biomedical Engineers. Proceedings of the 16th Annual International Conference of the IEEE

Conference_Location

Baltimore, MD

Print_ISBN

0-7803-2050-6

Type

conf

DOI

10.1109/IEMBS.1994.415169

Filename

415169