DocumentCode
2343700
Title
MEMS comb-actuator resonance measurement method using the 2nd harmonics of the GND current
Author
Takahashi, Yoshikazu
fYear
2001
fDate
2001
Firstpage
333
Lastpage
337
Abstract
A new method for measuring the comb-actuator resonant that uses the 2nd harmonics of the GND current is described. The method is based on the fact that the 2nd harmonics of the GND current is in proportion to the velocity of the comb-actuator. This method enables the inexpensive and stable test system
Keywords
electric current measurement; electrostatic actuators; equivalent circuits; harmonics; resonance; testing; 2nd harmonic; MEMS comb-actuator; comb-actuator velocity; current measure system; electrostatic force; equivalent electrical circuit; ground current; resonance measurement method; stable test system; Actuators; Current measurement; Electrodes; Electrostatic measurements; Frequency; Micromechanical devices; Resonance; Velocity measurement; Vibration measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Test Symposium, 2001. Proceedings. 10th Asian
Conference_Location
Kyoto
ISSN
1081-7735
Print_ISBN
0-7695-1378-6
Type
conf
DOI
10.1109/ATS.2001.990305
Filename
990305
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