Linearized control methods for piezodriven micropositioning system with nanoresolution

Summary form only given. This paper discusses the linearized control methods of piezoelectrically driven micropositioning system. Weaknesses of charge control theory are expounded; chiefly, it is hard to get wide frequency band because the piezoelectric element breaks down when a high field intensity is applied to it. It is therefore proposed that harmonic linearization theory, which is more generalized than charge control theory, be used for this nonlinear problem. A graphic solution is given. Combining this with the charge control method, a control system was designed. Thus, a new way is opening up to study the basic nonlinear characteristics and to improve the dynamic performance of this kind of system. With an example, the way to obtain nanometer resolution, good linearity and dynamic characteristics was pointed out.