Title :
MEMS for telecommunications: devices and reliability
Author :
Chang, Chomg-Ping
Author_Institution :
New Jersey Nanotechnolgy Consortium, Murray Hill, NJ, USA
Abstract :
This paper presents an overview of MEMS devices for telecommunications and their reliability issues. MEMS for antenna switches, tunable capacitors, inductors, resonators and other devices have been extensively developed for wireless communication applications. For optical network infrastructure, MEMS for optical cross connects, gain equalizers, add-drop multiplexers, WDM/DWDM switches and others have been successfully demonstrated. Significant knowledge has been gained on MEMS failure modes and design/processing guidelines. Improvements on device lifetime and environmental robustness hold the key to ultimate success of MEMS product commercialization.
Keywords :
micromechanical devices; optical communication equipment; radio equipment; reliability; MEMS design/processing; MEMS devices; MEMS failure modes; MEMS product commercialization; MEMS reliability; WDM/DWDM switches; add-drop multiplexers; antenna switches; device lifetime; environmental robustness; gain equalizers; optical cross connects; optical network infrastructure; resonators; telecommunications; tunable capacitors; tunable inductors; wireless communication; Capacitors; Communication switching; Microelectromechanical devices; Micromechanical devices; Optical fiber networks; Optical resonators; Optical switches; Telecommunication network reliability; Telecommunication switching; Wavelength division multiplexing;
Conference_Titel :
Custom Integrated Circuits Conference, 2003. Proceedings of the IEEE 2003
Print_ISBN :
0-7803-7842-3
DOI :
10.1109/CICC.2003.1249390
