Q-Factor Performance Analysis of Spiral Inductors Using Multilayer Structures

The great flexibility of three-dimensional multilayer technology which newly developed spiral inductors have been designed and optimized. The chosen approach for the spiral implementation loaded is a coplanar wave guide (CPW) transmission lines. The multilayer spiral inductors are very compact and having resonant frequency band between 5 GHz to 70 GHz. The area of multilayer inductor is nearly four times smaller compared to planar design in maintaining the same performance. CST software was used for electromagnetic(EM) simulation and the multilayer inductors are analyzed using EM analysis. These miniaturized inductors are designed using a combination of three metals (Au) and three polyimide dielectric layers on semi-insulating GaAs substrates. The related layout materials in integrated circuits and the effect of the inductor Q-factor on the performance of radio-frequency (RF) is discussed. Circuit design features such as minimum inductors area, the thickness of dielectric layers, and the important effect of metals and substrates loss on the inductor aspects are being addressed.