An analysis and performance assessment of double EWMA control systems

Author

Ma Mingda ; Tan Feng ; Zhang Kai ; Duan Guangren

Author_Institution

Center for Control & Guidance Technol., Harbin Inst. of Technol., Harbin, China

fYear

2014

fDate

28-30 July 2014

Firstpage

2985

Lastpage

2989

Abstract

Run-to-run (RtR) control technology has received tremendous interest in semiconductor manufacturing industry. Exponentially weighted moving average (EWMA), double EWMA controllers are recognized most popular control schemes for RtR control. In this paper, stability analysis of double EWMA control system is examined in control theory. The novelty of this work is that an iterative method is developed to obtain the best achievable performance of the double EWMA control system. The performance of double EWMA control system is evaluated and the discount factors are retuned. Simulation example is given to show the effectiveness of the proposed method.

Keywords

autoregressive moving average processes; control system synthesis; iterative methods; semiconductor industry; stability; RtR control; double EWMA control systems; exponentially weighted moving average; iterative method; run-to-run control technology; semiconductor manufacturing industry; stability analysis; Control systems; Control theory; Equations; Optimized production technology; Process control; Stability criteria; Run-to-run control; best achievable performance (BAP); double exponentially weighted moving average (EWMA); performance assessment;

fLanguage

English

Publisher

ieee

Conference_Titel

Control Conference (CCC), 2014 33rd Chinese

Conference_Location

Nanjing

Type

conf

DOI

10.1109/ChiCC.2014.6897116

Filename

6897116