DocumentCode :
2346524
Title :
Measurement of contact resistance distribution using a 4k contacts array
Author :
Hamamoto, Takayuki ; Ozaki, Takashi ; Aoki, Masaki ; Ishibashi, Y.
Author_Institution :
ULSI Res. Center, Toshiba Corp., Kawasaki, Japan
fYear :
1995
fDate :
22-25 Mar 1995
Firstpage :
57
Lastpage :
61
Abstract :
A new test structure suitable for measuring a contact resistance distribution has been developed. It includes the following two components: (1) a 256 row, 16 column (=4096) four-terminal cross-contact array; and (2) peripheral circuits, which consist of an eight-stage CMOS binary counter and 256 bit CMOS decoders. It was found that contact resistance can be fitted by a Gaussian distribution more than three standard deviations of the mean value. The relationships between the contact size and the standard deviation of the contact resistance has been discussed for two types of contacts: Al/TiN/TiSi2-n+Si and WSi2/poly-n+Si. This test structure can simultaneously measure the series resistance of a two-terminal contact chain and the individual contact resistance. Comparing these results, it was found that the increase of the series resistance of the contact chain is due to the appearance of the contact that is outside of the Gaussian distribution
Keywords :
CMOS integrated circuits; Gaussian distribution; ULSI; contact resistance; electric resistance measurement; integrated circuit measurement; integrated circuit testing; Al-TiN-TiSi2-Si; CMOS process; Gaussian distribution; ULSI circuits; WSi2-Si; contact resistance distribution; contact resistance measurement; contacts array; four-terminal cross-contact array; test structure; Contact resistance; Counting circuits; Decoding; Electrical resistance measurement; Fluctuations; Gaussian distribution; MOSFETs; Testing; Tin; Ultra large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 1995. ICMTS 1995. Proceedings of the 1995 International Conference on
Conference_Location :
Nara
Print_ISBN :
0-7803-2065-4
Type :
conf
DOI :
10.1109/ICMTS.1995.513945
Filename :
513945
Link To Document :
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