DocumentCode
2346802
Title
Accurate capacitor matching measurements using floating gate test structures
Author
Tuinhout, H.P. ; Elzinga, H. ; Brugman, J.T. ; Postma, F.
Author_Institution
Philips Res. Lab., Eindhoven, Netherlands
fYear
1995
fDate
22-25 Mar 1995
Firstpage
133
Lastpage
137
Abstract
This paper discusses a new method for characterization of matching of capacitors using the so-called floating gate capacitance measurement method. The paper explains this (DC!!) measurement method and then discusses modifications that were implemented to improve the measurement accuracy and repeatability from its original thousands of ppms (0.1 to 0.3%) to values down to 50 ppm. This improved accuracy is necessary for correct characterization of capacitor matching. The method is demonstrated with results from double-polysilicon capacitor matching measurements
Keywords
MOS capacitors; capacitance measurement; semiconductor device testing; DC measurement; Si; capacitance measurement; capacitor matching; double-polysilicon capacitor; floating gate test structures; Capacitance measurement; Circuit testing; Field-flow fractionation; Integrated circuit measurements; MOSFET circuits; Postal services; Signal processing; Switched capacitor circuits; Time measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1995. ICMTS 1995. Proceedings of the 1995 International Conference on
Conference_Location
Nara
Print_ISBN
0-7803-2065-4
Type
conf
DOI
10.1109/ICMTS.1995.513960
Filename
513960
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