Title :
Low loss passive microwave components in standard silicon technology
Author :
Berg, H. ; Jacobsson, H. ; Lewin, T. ; Berg, K. ; Schuppen, A. ; Gevorgian, S.
Author_Institution :
Chalmers Univ. of Technol., Goteborg, Sweden
Abstract :
Experimental performances of coplanar strips (CPS), lumped inductor coils, baluns and LC resonators are presented in a wide frequency band. All these components are made in low resistivity (/spl rho/<20 /spl Omega/ cm) substrates using standard silicon technologies. It is shown that microwave losses in these passive components may be substantially reduced without changes in the standard processing steps.
Keywords :
MMIC; baluns; coplanar transmission lines; elemental semiconductors; inductors; losses; resonators; silicon; LC resonators; MMIC; Si; baluns; coplanar strips; low loss passive microwave components; low resistivity substrates; lumped inductor coils; microwave losses; passive components; Conductivity; Dielectric losses; Dielectric substrates; Frequency; Inductors; Microwave technology; Semiconductor device measurement; Silicon; Strips; Transmission line measurements;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.863562
