Title :
Resistance modeling of test structures for accurate fault detection in backend process steps using a digital tester
Author :
Hess, Christopher ; Weiland, Larg H.
Author_Institution :
Inst. of Comput. Design & Fault Tolerance, Karlsruhe Univ., Germany
Abstract :
A methodology is presented to enable the usage of a digital tester for an accurate detection of open circuits as well as short circuits in test structures to control backend process steps. Therefore, a novel graph model will be introduced to calculate the resistance values of test structures containing defects. The paper gives a comprehensive description of the procedure to adjust the tester parameters to those test structures
Keywords :
electric resistance measurement; fault diagnosis; integrated circuit technology; integrated circuit testing; semiconductor process modelling; IC testing; backend process steps; digital tester; fault detection; graph model; open circuits; resistance modeling; resistance values; short circuits; test structures; tester parameters; Circuit testing; Electric variables measurement; Electrical resistance measurement; Equivalent circuits; Fault detection; Frequency measurement; Geometry; Process control; Semiconductor device measurement; Voltage;
Conference_Titel :
Microelectronic Test Structures, 1995. ICMTS 1995. Proceedings of the 1995 International Conference on
Conference_Location :
Nara
Print_ISBN :
0-7803-2065-4
DOI :
10.1109/ICMTS.1995.513985
