Title :
A parametric model of MEMS capacitive switch operating at microwave frequencies
Author :
Qian, J.Y. ; Li, G.P. ; de Flavis, F.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Irvine, CA, USA
Abstract :
This paper is focused on the creation of an efficient electromagnetic model of MEMS switches which operates at microwave frequencies. The switches are first characterized using a full wave analysis based on finite element method aiming to extract the S-parameters of the switches for different geometrical dimensions. From the S-parameter data base, a scalable lumped circuit model is extracted to allow easy implementation of the switch model into available microwave CAD software. The simulated results are compared with published measured data as validation of our model.
Keywords :
S-parameters; finite element analysis; micromechanical devices; microwave switches; semiconductor device models; MEMS capacitive switch; S-parameters; electromagnetic model; finite element method; full wave analysis; geometrical dimensions; microwave CAD software; microwave frequencies; parametric model; scalable lumped circuit model; Data mining; Electromagnetic modeling; Finite element methods; Micromechanical devices; Microswitches; Microwave circuits; Microwave frequencies; Parametric statistics; Scattering parameters; Switches;
Conference_Titel :
Microwave Symposium Digest. 2000 IEEE MTT-S International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-5687-X
DOI :
10.1109/MWSYM.2000.863581
