Title :
4E-5 Measurement of Acoustical Parameters of Thin Films
Author :
Kaitila, J. ; Fattinger, G.G.
Author_Institution :
Infineon Technol. AG, Neubiberg
Abstract :
The workhorse of bulk acoustic wave (BAW) resonator design and analysis is the Mason model. This transmission line model takes as input parameters the thickness, (longitudinal) acoustic velocity and (longitudinal) acoustic impedance of the various layers constituting the resonator. Accurate knowledge of these parameters is essential for successful design and analysis of devices. In this paper we present a straightforward method for measuring these longitudinal wave parameters. Finally we will also make brief comments on how to evaluate the shear wave parameters
Keywords :
acoustic impedance; acoustic wave velocity measurement; thin films; Mason model; acoustic impedance; acoustic velocity; acoustical parameters; bulk acoustic wave resonator design; shear wave parameters; thin films; transmission line model; Acoustic devices; Acoustic measurements; Acoustic pulses; Acoustic waves; Pulse measurements; Surface acoustic waves; Thickness measurement; Time measurement; Transistors; Transmission line measurements;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.124
