Title :
The electrical and optical properties of implanted amorphous silicon
Author :
Wei, Jeng-Hua ; Lee, Si-Chen
Author_Institution :
National Taiwan University
Keywords :
Amorphous silicon; Annealing; Conductivity; Doping; Hydrogen; Impurities; Ion implantation; Optical films; Particle beam optics; Silicon alloys;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.863881
