DocumentCode
2349400
Title
A new process for liquid phase deposition of silicon oxide and its application in amorphous silicon thin film transisitor
Author
Chou, Jenq-Shuh ; Chen, Maw-Song ; Lee, Si-Chen
Author_Institution
National Taiwan University
fYear
1994
fDate
1994
Keywords
Amorphous silicon; Electrodes; Fabrication; Glass; Planarization; Semiconductor thin films; Silicon compounds; Sputtering; Temperature; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type
conf
DOI
10.1109/EDMS.1994.863882
Filename
863882
Link To Document