Title :
SEMATECH and the University of Texas cooperative research in semiconductor manufacturing technology
Author :
Brown, Steven ; Pittman, Sarah E.
Author_Institution :
Motorola Inc., USA
Abstract :
An overview is provided of current research in microelectronics manufacturing technology being conducted by University of Texas graduate students for SEMATECH´s Factory Integration division. As part of these planned internships, the candidates for Master of Science degrees in Operations Research selected academic report topics related to factory performance issues for advanced-technology wafer fabrication facilities. The relevance of such work to understanding the robustness of high-technology production operations is discussed. Additionally, the paper critiques the internship program itself, sharing successes and lessons learned
Keywords :
electronic engineering education; factory automation; integrated circuit manufacture; research initiatives; semiconductor technology; technology transfer; SEMATECH; University of Texas; advanced-technology wafer fabrication facilities; cooperative research; factory performance issues; graduate students; high-technology production operations; microelectronics manufacturing; operations research; planned internships; semiconductor manufacturing technology; Analytical models; Costs; Fabrication; Microelectronics; Operations research; Performance analysis; Production facilities; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor device reliability;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1995., Proceedings of the Eleventh Biennial
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-2596-6
DOI :
10.1109/UGIM.1995.514113
