Total quality manufacturing at the RIT integrated circuit factory

Author

Fuller, L.F. ; Hirschman, K.D. ; Waldrop, P.C.

Author_Institution

Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA

fYear

1995

fDate

16-17 May 1995

Firstpage

52

Lastpage

56

Abstract

RIT has received a five year grant from IBM through an IBM Total Quality Management (TQM) Competition. Among the several projects funded by this grant is a project entitled “Six Sigma Process Capability in Student-Run Integrated Circuit Factory”. The process capability baseline has been obtained from data collected for the past several years of student-run factory operation. A methodology to improve the quality of the student-run factory was implemented and is described in detail. The baseline study found that none of processes had process capability (Cpk) greater than one (3 sigma). However, action plans for improving these processes have been implemented and improvements have been measured. Today several processes show Cpk>1. The student run integrated circuit factory at RIT has made significant progress toward achieving six-sigma manufacturing goals

Keywords

electronic engineering education; integrated circuit manufacture; management; process control; quality control; statistical process control; student experiments; IBM TQM; RIT; six-sigma process capability; student-run integrated circuit factory; total quality manufacturing; Computer integrated manufacturing; Integrated circuit manufacture; Laboratories; Microelectronics; Plasma applications; Plasma chemistry; Process control; Production facilities; Total quality management; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 1995., Proceedings of the Eleventh Biennial

Conference_Location

Austin, TX

ISSN

0749-6877

Print_ISBN

0-7803-2596-6

Type

conf

DOI

10.1109/UGIM.1995.514116

Filename

514116