Computational prototyping for advanced semiconductor structures

Author

Schen, Michael ; Scace, Robert ; Leedy, Tom

Author_Institution

Lab. for Mater. Sci. & Eng., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA

fYear

1995

fDate

16-17 May 1995

Firstpage

77

Lastpage

83

Abstract

Summary form only given. Technology CAD (TCAD) tools are now an essential part of new process and device design. And their predictive capability has improved dramatically because of improved gridding, numerical methods and, perhaps most importantly, better physical models. This talk will describe the current situation in TCAD, focusing primarily on process simulation because this has historically been the weakest link the hierarchy of simulation tools. Examples of what is possible today with modern TCAD tools will be presented. Computational prototyping will be the cornerstone of new semiconductor designs in the 21st century. We are well on the way towards achieving its long promised capabilities

Keywords

CAD; electronic engineering computing; integrated circuit design; semiconductor process modelling; TCAD tools; computational prototyping; device design; gridding; numerical methods; physical models; process simulation; semiconductor structures; Assembly; Collaboration; Electronics packaging; Integrated circuit interconnections; Laboratories; Manufacturing industries; Metrology; Microelectronics; NIST; Semiconductor device packaging;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 1995., Proceedings of the Eleventh Biennial

Conference_Location

Austin, TX

ISSN

0749-6877

Print_ISBN

0-7803-2596-6

Type

conf

DOI

10.1109/UGIM.1995.514120

Filename

514120