Title :
Planarization of deep trench with LOCOS for silicon monolithic microwave integrated circuit
Author :
Lo, T.C. ; Zhang, J.S. ; Huang, H.C. ; Huang, G.W. ; Su, S. ; Chang, C.Y.
Author_Institution :
National Chiao Tung University
Keywords :
Etching; Geometry; Integrated circuit technology; MMICs; Microwave integrated circuits; Monolithic integrated circuits; Oxidation; Planarization; Resists; Silicon;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.863898
