DocumentCode
2349640
Title
Planarization of deep trench with LOCOS for silicon monolithic microwave integrated circuit
Author
Lo, T.C. ; Zhang, J.S. ; Huang, H.C. ; Huang, G.W. ; Su, S. ; Chang, C.Y.
Author_Institution
National Chiao Tung University
fYear
1994
fDate
1994
Keywords
Etching; Geometry; Integrated circuit technology; MMICs; Microwave integrated circuits; Monolithic integrated circuits; Oxidation; Planarization; Resists; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
Type
conf
DOI
10.1109/EDMS.1994.863898
Filename
863898
Link To Document