DocumentCode
2349778
Title
Variability origins of FinFETs and perspective beyond 20nm node
Author
Matsukawa, Takashi ; Liu, Yongxun ; Endo, Kazuhiko ; O´Uchi, Shin-Ichi ; Masahara, Meishoku
Author_Institution
Nanoelectron. Res. Inst., AIST, Tsukuba, Japan
fYear
2011
fDate
3-6 Oct. 2011
Firstpage
1
Lastpage
28
Abstract
A collection of slides from the author´s conference covering the following topics: merit of FinFETs in variability issues; origins of Vt variability; parasitic resistance variation; and perspective beyond 20nm-node.
Keywords
MOSFET; FinFET variability origins; parasitic resistance variation; perspective beyond 20nm node; Conferences; FinFETs; Fluctuations; Logic gates; MOSFET circuits; Resource description framework; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference (SOI), 2011 IEEE International
Conference_Location
Tempe, AZ
ISSN
1078-621X
Print_ISBN
978-1-61284-761-0
Electronic_ISBN
1078-621X
Type
conf
DOI
10.1109/SOI.2011.6081713
Filename
6081713
Link To Document