DocumentCode
2350144
Title
Electrical testing and simulation in the Microelectronic Engineering Department at RIT
Author
Pearson, Robert ; Hildreth, Scott ; Smeenge, J.M. ; Kroezen, Harm
Author_Institution
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
fYear
1995
fDate
16-17 May 1995
Firstpage
241
Lastpage
244
Abstract
The education of a microelectronic process engineer involves a number of disciplines that must be woven together in the curriculum. The overall goal that a process engineer strives for is improvement of the product. Certain classes may focus on analyzing and improving individual processes such as plasma etching. The data collected for an individual process may not be easy to link to final product performance parameters. The final product´s improvement is typically monitored by measurement of device or circuit electrical parameters. Electrical testing done in manufacturing classes then plays a key role in the education of a microelectronic engineer. The goal is to have the collected data tie together processing device physics, electronics and statistics course work. This paper describes the broad approach RIT has used to meet this goal
Keywords
educational courses; electronic engineering education; integrated circuit design; integrated circuit manufacture; integrated circuit testing; production testing; IC testing; Microelectronic Engineering Department; education; electrical testing; manufacturing classes; microelectronic process engineers; simulation; Condition monitoring; Educational products; Etching; Microelectronics; Plasma applications; Plasma devices; Plasma materials processing; Plasma measurements; Plasma simulation; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 1995., Proceedings of the Eleventh Biennial
Conference_Location
Austin, TX
ISSN
0749-6877
Print_ISBN
0-7803-2596-6
Type
conf
DOI
10.1109/UGIM.1995.514153
Filename
514153
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