Abstract :
The following topics are dealt with: FinFET; nanowires; FD SOI devices; MOSFET; III-V devices; memories; MEMS; and sensors.
Keywords :
III-V semiconductors; MOSFET; micromechanical devices; nanowires; sensors; silicon-on-insulator; storage management chips; FD SOI devices; FinFET; III-V devices; MEMS; MOSFET; memories; nanowires; sensors;
Conference_Titel :
SOI Conference (SOI), 2011 IEEE International
Conference_Location :
Tempe, AZ
Print_ISBN :
978-1-61284-761-0
Electronic_ISBN :
1078-621X
DOI :
10.1109/SOI.2011.6081787