DocumentCode
2351112
Title
Experimental study of carrier transport in ultra-thin body GeOI MOSFETs
Author
Lee, C.H. ; Nishimura, T. ; Tabata, T. ; Zhao, D. ; Ifuku, R. ; Nagashio, K. ; Kita, K. ; Toriumi, A.
Author_Institution
Dept. of Mater. Eng., Univ. of Tokyo, Tokyo, Japan
fYear
2011
fDate
3-6 Oct. 2011
Firstpage
1
Lastpage
2
Abstract
We have investigated carrier transport properties in ultra-thin body (UTB) Ge-on-Insulator (GeOI) MOSFETs for the first time. Both n- and p-channel MOSFET operation fabricated on 9 nm GeOI has been demonstrated. In addition, a significant difference of Ge crystallinity in the front-channel from that in back-one is reported to explain the mobility degradation in UTB region.
Keywords
MOSFET; semiconductor-insulator boundaries; Ge crystallinity; UTB region; carrier transport properties; mobility degradation; size 9 nm; ultra-thin body Ge-on-insulator MOSFET; ultra-thin body GeOI MOSFET; CMOS integrated circuits; Charge carrier processes; Logic gates; MOSFET circuits; MOSFETs; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference (SOI), 2011 IEEE International
Conference_Location
Tempe, AZ
ISSN
1078-621X
Print_ISBN
978-1-61284-761-0
Electronic_ISBN
1078-621X
Type
conf
DOI
10.1109/SOI.2011.6081794
Filename
6081794
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