Title :
Zincation characterization for electroless Ni/Au UBM of solder bumping technology
Author :
Tan, Qing ; Beddingfield, Craig ; Mistry, Addi ; Mathew, Varughese
Author_Institution :
Motorola Inc., Austin, TX, USA
Abstract :
A Zn layer is formed on the aluminum pad of an integrated circuit prior to the deposition of electroless Ni/P and immersion Au layers and the subsequent formation of a eutectic Pb-Sn solder bump from stencil-printed solder paste. Different zincation levels are observed from visual inspection of the bond pad. These zincation levels can be in evidence on the same wafer. As a result, it was necessary to determine the significance of the individual bond pad´s coloration/zincation level in order to guarantee the reliability of solder bumps. The integrity of the solder bumps was evaluated through contact resistance measurement, bump shear, and stud pull after thermal conditioning. The results show that, although the zincation level has measurable influence on the bump strength, both electrical and mechanical properties of the bumps are acceptable for all zincation levels
Keywords :
adhesion; contact resistance; electroless deposition; flip-chip devices; gold; inspection; integrated circuit interconnections; integrated circuit metallisation; integrated circuit packaging; integrated circuit reliability; integrated circuit testing; mechanical testing; microassembling; nickel; shear strength; soldering; zinc; Al; SnPb-Au-NiP-Zn-Al; Zn layer formation; aluminum pad; bond pad; bond pad coloration; bond pad zincation level; bump electrical properties; bump mechanical properties; bump shear testing; bump strength; contact resistance measurement; electroless Ni/Au UBM; electroless Ni/P layer; flip chip packaging; immersion Au layer; integrated circuit; solder bump integrity; solder bump reliability; solder bumping technology; stencil-printed solder paste; stud pull testing; thermal conditioning; under-bump metallization; visual inspection; zincation characterization; zincation level; Aluminum; Contact resistance; Electric variables measurement; Electrical resistance measurement; Gold; Inspection; Mechanical variables measurement; Thermal resistance; Wafer bonding; Zinc;
Conference_Titel :
Electronics Manufacturing Technology Symposium, 1998. Twenty-Third IEEE/CPMT
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-4523-1
DOI :
10.1109/IEMT.1998.731012