DocumentCode
2351298
Title
Zincation characterization for electroless Ni/Au UBM of solder bumping technology
Author
Tan, Qing ; Beddingfield, Craig ; Mistry, Addi ; Mathew, Varughese
Author_Institution
Motorola Inc., Austin, TX, USA
fYear
1998
fDate
19-21 Oct 1998
Firstpage
34
Lastpage
40
Abstract
A Zn layer is formed on the aluminum pad of an integrated circuit prior to the deposition of electroless Ni/P and immersion Au layers and the subsequent formation of a eutectic Pb-Sn solder bump from stencil-printed solder paste. Different zincation levels are observed from visual inspection of the bond pad. These zincation levels can be in evidence on the same wafer. As a result, it was necessary to determine the significance of the individual bond pad´s coloration/zincation level in order to guarantee the reliability of solder bumps. The integrity of the solder bumps was evaluated through contact resistance measurement, bump shear, and stud pull after thermal conditioning. The results show that, although the zincation level has measurable influence on the bump strength, both electrical and mechanical properties of the bumps are acceptable for all zincation levels
Keywords
adhesion; contact resistance; electroless deposition; flip-chip devices; gold; inspection; integrated circuit interconnections; integrated circuit metallisation; integrated circuit packaging; integrated circuit reliability; integrated circuit testing; mechanical testing; microassembling; nickel; shear strength; soldering; zinc; Al; SnPb-Au-NiP-Zn-Al; Zn layer formation; aluminum pad; bond pad; bond pad coloration; bond pad zincation level; bump electrical properties; bump mechanical properties; bump shear testing; bump strength; contact resistance measurement; electroless Ni/Au UBM; electroless Ni/P layer; flip chip packaging; immersion Au layer; integrated circuit; solder bump integrity; solder bump reliability; solder bumping technology; stencil-printed solder paste; stud pull testing; thermal conditioning; under-bump metallization; visual inspection; zincation characterization; zincation level; Aluminum; Contact resistance; Electric variables measurement; Electrical resistance measurement; Gold; Inspection; Mechanical variables measurement; Thermal resistance; Wafer bonding; Zinc;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Manufacturing Technology Symposium, 1998. Twenty-Third IEEE/CPMT
Conference_Location
Austin, TX
ISSN
1089-8190
Print_ISBN
0-7803-4523-1
Type
conf
DOI
10.1109/IEMT.1998.731012
Filename
731012
Link To Document