Title :
A novel bipolar/MOS device on SOI wafers for analog BiCMOS applications
Author :
Yallup, Kevin ; Edwards, Susan ; Creighton, Oliver
Author_Institution :
Analog Devices, Limerick, Ireland
Abstract :
Describes a novel bipolar transistor structure that can be fabricated on SOI wafers. The device combines a vertical base current flow path with a lateral collector flow path to form a BiMOS transistor
Keywords :
BiCMOS analogue integrated circuits; bipolar transistors; silicon-on-insulator; BiMOS transistor; SOI wafers; analog BiCMOS applications; bipolar transistor structure; bipolar/MOS device; lateral collector flow path; vertical base current flow path; BiCMOS integrated circuits; Bipolar transistors; CMOS process; MOS devices; Semiconductor films; Silicon; Springs; Textile industry; Voltage; Wafer bonding;
Conference_Titel :
SOI Conference, 1994 Proceedings., 1994 IEEE International
Conference_Location :
Nantucket, MA
Print_ISBN :
0-7803-2406-4
DOI :
10.1109/SOI.1994.514228
