Accuracy and composability in NODAS

Simulation accuracy of a methodology for composable modeling of microelectromechanical systems (MEMS) is assessed by comparing against analytic equations and finite element simulations. Several MEMS canonical problems are composed hierarchically as networks of simple elements with models written in an analog hardware description language. Schematics built from this model library, called NODAS (nodal design of actuators and sensors), produce DC simulation results that are accurate to at least three digits, demonstrating suitable accuracy and lumping trade-offs.