Title :
Accuracy issues in a high-level model for MEMS varactors
Author :
Sankaranarayanan, Janakiram G. ; Behera, Manas ; Aluru, Narayan ; Mayaram, Kartikeya
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Oregon State Univ., Corvallis, OR, USA
Abstract :
We present accuracy issues for an equivalent circuit model and an AHDL model (high-level models) of MEMS varactors. Simulations of different MEMS varactor structures were done using the high-level models and an electrostatic/mechanical solver EMS.9. The limitations of the varactor high-level models are presented in the context of a RF MEMS VCO operating at 1.6 GHz in a TSMC 0.35 m CMOS technology.
Keywords :
circuit simulation; electrostatics; equivalent circuits; micromechanical devices; varactors; voltage-controlled oscillators; AHDL model; CMOS technology; MEMS varactors; RF MEMS VCO; electrostatic/mechanical solver EMS.9; equivalent circuit model; high-level model; CMOS technology; Circuit simulation; Context modeling; Electrostatics; Equivalent circuits; Micromechanical devices; Radiofrequency microelectromechanical systems; Semiconductor device modeling; Varactors; Voltage-controlled oscillators;
Conference_Titel :
Behavioral Modeling and Simulation, 2003. BMAS 2003. Proceedings of the 2003 International Workshop on
Print_ISBN :
0-7803-8135-1
DOI :
10.1109/BMAS.2003.1249874
