Current issues of MEMS foundry network in Japan

The MEMS makes miniaturization, being the low in cost and the mass production of the precise mechanism parts and the modules of the machine, the optics, and fluid and so on possible. Also, it is the technology of "pivot" which differentiates a product and it is indispensable to strengthen the international competitiveness of the product. However, specifically in Japan, the specific company, which has the strong in-house application, was developing MEMS in large volume so far. As for this report, the intention of the MEMS foundry service industry committee which was started in July, 2002 to promote industry of MEMS in a little with numerous kind, and the best field of the participation company, an activity is explained. It is keen to contribute to the competitiveness reinforcement by the industry in a wide range of fields using MEMS by a lot of people.