Title :
P1I-5 Micro-Machined, All Quartz Package, Passive Wireless SAW Pressure and Temperature Sensor
Author :
Lardat, R. ; Penavaire, L. ; Menage, P. ; Chommeloux, L. ; Huet, H. ; Lestrat, C. ; Pastureaud, T. ; Haon, F. ; Steichen, W. ; Ballandras, S. ; Heider, G.
Author_Institution :
TEMEX, Sophia Antipolis
Abstract :
An example of SAW P&T sensor is shown. This sensor is to operate for TPMS using the 434 MHz ISM band. Design of this sensor is based on simplicity, leading to micro-machined all quartz SAW device. Details of design process, realization and sensor responses are shown
Keywords :
micromachining; pressure sensors; quartz; surface acoustic wave sensors; temperature sensors; wafer bonding; 434 MHz; ISM band; TPMS; all quartz SAW device; glass frit; micromachining; passive wireless SAW pressure sensor; passive wireless SAW temperature sensor; perturbation theory; wafer bonding; Manufacturing; Mechanical sensors; Packaging; Process design; Resonance; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; Wireless sensor networks;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.363
