Wireless micro-machine with magnetic thin film

Author

Yamazaki, Aya ; Sendoh, Masahiko ; Ishiyama, Kazushi ; Arai, Ken Lchi ; Kato, Ryutaro ; Nakano, Masaki ; Fukunaga, Hirotoshi

Author_Institution

Tohoku Univ., Sendai, Japan

fYear

2003

fDate

19-22 Oct. 2003

Firstpage

39

Lastpage

44

Abstract

As the magnetic micro-machines are driven by a magnetic field, they require no power supply cables, no batteries, and no controlling systems on the machine body. We fabricated the spiral-type micro-machine (outer diameter; 0.14 mm, length; 1.0 mm) by a tungsten wire (Φ 20 μm). NdFeB film magnet was deposited on the spiral-machine by the PLD method. In the experiment, the wireless micro-machine swam at the speed of 0.2 ∼ 1.6 mm/s. This result indicated that the spiral shape was suitable for miniature swimming machine.

Keywords

boron alloys; iron alloys; magnetic fields; magnetic thin films; micromechanical devices; neodymium alloys; permanent magnets; tungsten; 0.14 mm; 0.2 to 1.6 mm/s; 1.0 mm; NdFeB; W; magnetic field; magnetic micromachines; magnetic thin film; miniature swimming machine; spiral-type micromachine; tungsten wire; wireless micromachine; Batteries; Cables; Control systems; Magnetic fields; Magnetic films; Micromagnetics; Power supplies; Spirals; Tungsten; Wire;

fLanguage

English

Publisher

ieee

Conference_Titel

Micromechatronics and Human Science, 2003. MHS 2003. Proceedings of 2003 International Symposium on

Print_ISBN

0-7803-8165-3

Type

conf

DOI

10.1109/MHS.2003.1249907

Filename

1249907