DocumentCode :
2353720
Title :
P1J-2 Electromechanical Coupling Coefficient k15 and Crystallites Alignment of (1120) Textured ZnO Films
Author :
Yanagitani, Takahiko ; Kiuchi, Masato ; Matsukawa, Mami ; Watanabe, Yoshiaki
Author_Institution :
Kansai collaboration center, National Inst. of Adv. Ind. Sci. & Technol., Osaka
fYear :
2006
fDate :
2-6 Oct. 2006
Firstpage :
1463
Lastpage :
1466
Abstract :
Pure-shear mode piezoelectric device applications require that the ZnO film where crystallites c-axis lie in the substrate plane and be unidirectionally aligned ((112macr0) textured ZnO films). This paper reports the relationship between degrees of crystallites alignment and shear mode electromechanical coupling coefficient k15 of the (112macr0) textured ZnO films
Keywords :
II-VI semiconductors; acoustic resonators; bulk acoustic wave devices; crystallites; electromechanical effects; piezoelectric thin films; wide band gap semiconductors; zinc compounds; (112macr0) textured ZnO film; RF magnetron sputtering; crystallites alignment; electromechanical coupling coefficient; film bulk acoustic resonator; pure-shear mode piezoelectric device; Anodes; Crystallization; Electrodes; Film bulk acoustic resonators; Piezoelectric films; Radio frequency; Silicon compounds; Sputtering; Substrates; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
ISSN :
1051-0117
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
Type :
conf
DOI :
10.1109/ULTSYM.2006.368
Filename :
4152224
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2353720
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