A stochastic integral equation method for modeling the rough surface effect on interconnect capacitance

Author

Zhu, Zhenhai ; White, Jacob ; Demir, Alper

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Massachusetts Inst. of Technol., Cambridge, MA, USA

fYear

2004

fDate

7-11 Nov. 2004

Firstpage

887

Lastpage

891

Abstract

In This work we describe a stochastic integral equation method for computing the mean value and the variance of capacitance of interconnects with random surface roughness. An ensemble average Green´s function is combined with a matrix Neumann expansion to compute nominal capacitance and its variance. This method avoids the time-consuming Monte Carlo simulations and the discretization of rough surfaces. Numerical experiments show that the results of the new method agree very well with Monte Carlo simulation results.

Keywords

Green´s function methods; capacitance; integral equations; integrated circuit interconnections; integrated circuit modelling; rough surfaces; stochastic processes; Green function; interconnect capacitance; matrix Neumann expansion; random surface roughness; rough surface effect; stochastic integral equation; Acoustic scattering; Analysis of variance; Capacitance; Electromagnetic scattering; Integral equations; Rough surfaces; Stochastic processes; Surface resistance; Surface roughness; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Computer Aided Design, 2004. ICCAD-2004. IEEE/ACM International Conference on

ISSN

1092-3152

Print_ISBN

0-7803-8702-3

Type

conf

DOI

10.1109/ICCAD.2004.1382699

Filename

1382699