Title :
P2M-2 Acoustic Losses in Busbars
Author :
Meltaus, Johanna ; Hong, Seong Su ; Plessky, Victor P.
Author_Institution :
Samsung Electro-Mechanic Co., Ltd., Suwon
Abstract :
Radiation of acoustic waves from the contact electrodes (busbars) of surface acoustic wave (SAW) devices on high-coupling piezoelectric substrates, such as 42deg-LiTaO3, is demonstrated both with finite-element-method (FEM) simulations and with experimental data. This acoustic radiation, as well as resistive losses, significantly decrease the Q-value of the busbars. Experimental measurements on test structures show Q-values as low as about 10
Keywords :
acoustic generators; busbars; finite element analysis; lithium compounds; piezoelectric materials; surface acoustic wave transducers; LiTaO3; Q-value; acoustic losses; acoustic wave radiation; busbars; contact electrodes; finite element method; high-coupling piezoelectric substrate; resistive losses; surface acoustic wave devices; Acoustic devices; Acoustic waves; Capacitance; Electrodes; Gratings; Periodic structures; Piezoelectric materials; Radio frequency; Solids; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.377
