Title :
Semiconductor silicon carbide-expectation for power devices
Author_Institution :
Kyoto University
Keywords :
Chemical vapor deposition; Crystalline materials; Crystallization; Crystals; Epitaxial growth; Light emitting diodes; Semiconductor materials; Silicon carbide; Temperature; Wideband;
Conference_Titel :
Power Semiconductor Devices and ICs, 1990. ISPSD '90. Proceedings of the 2nd International Symposium on
DOI :
10.1109/ISPSD.1990.991051